CFX. |
| Class | Description | |
|---|---|---|
| CoatingProcessReading | ** NOTE: ADDED in CFX 1.2 ** Structure base class representing process data. Chamber pressure units in mbar. Vaporizer temperature in degrees Celsius.{
"Chamber Pressure": "100",
"Vaporizer Temperature" : "150"
} | |
| CoatingThicknessMeasurement | ** NOTE: ADDED in CFX 1.2 ** Structure base class representing slide position. Average coating thickness measured in micrometers. |