CFX. |
Class | Description | |
---|---|---|
CoatingProcessReading | ** NOTE: ADDED in CFX 1.2 ** Structure base class representing process data. Chamber pressure units in mbar. Vaporizer temperature in degrees Celsius.{ "Chamber Pressure": "100", "Vaporizer Temperature" : "150" } | |
CoatingThicknessMeasurement | ** NOTE: ADDED in CFX 1.2 ** Structure base class representing slide position. Average coating thickness measured in micrometers. |