| Member name | Value | Description | 
|---|
| BottomSprayBarsPressure | 0 | 
            Bottom spray bars pressure reading, expressed in Pascals (Pa)
             | 
| BottomWaterKnifePressure | 1 | 
            Bottom water knife pressure reading, expressed in Pascals (Pa)
             | 
| CleaningChemistryVolumeAdd | 2 | 
            Volume of cleaning chemistry added by the system, expressed in liter (l)
             | 
| ConcentrationMin | 3 | 
            min concentration reading, as a percentage from 0.0 to 100.0 (%)
             | 
| ConcentrationMax | 4 | 
            max concentration reading, as a percentage from 0.0 to 100.0 (%)
             | 
| ConcentrationAverage | 5 | 
            average concentration reading, as a percentage from 0.0 to 100.0 (%)
             | 
| ConductivityMin | 6 | 
            min conductivity reading, expressed in (uS/cm)
             | 
| ConductivityMax | 7 | 
            max conductivity reading, expressed in (uS/cm)
             | 
| ConductivityAverage | 8 | 
            average conductivity reading, expressed in (uS/cm)
             | 
| DIWaterVolumeAdd | 9 | 
            Volume of DI water added by the system, expressed in liter (l)
             | 
| FlowRateMin | 10 | 
            min flow rate reading, expressed in liter per minute (l/min)
             | 
| FlowRateMax | 11 | 
            max flow rate reading, expressed in liter per minute (l/min)
             | 
| FlowRateAverage | 12 | 
            average flow rate reading, expressed in liter per minute (l/min)
             | 
| LiquidConductivityMin | 13 | 
            min liquid conductivity reading, expressed in (uS/cm)
             | 
| LiquidConductivityMax | 14 | 
            max liquid conductivity reading, expressed in (uS/cm)
             | 
| LiquidConductivityAverage | 15 | 
            average liquid conductivity reading, expressed in (uS/cm)
             | 
| LiquidSaturationMin | 16 | 
            min liquid saturation reading, as a percentage from 0.0 to 100.0 (%)
             | 
| LiquidSaturationMax | 17 | 
            max liquid saturation reading, as a percentage from 0.0 to 100.0 (%)
             | 
| LiquidSaturationAverage | 18 | 
            average liquid saturation reading, as a percentage from 0.0 to 100.0 (%)
             | 
| PressureMin | 19 | 
            min liquid pressure reading, expressed in Pascals (Pa)
             | 
| PressureMax | 20 | 
            max liquid pressure reading, expressed in Pascals (Pa)
             | 
| PressureAverage | 21 | 
            average liquid pressure reading, expressed in Pascals (Pa)
             | 
| RefreshWaterAmount | 22 | 
            amount of refresh water, expressed in liter (l)
             | 
| TemperatureMin | 23 | 
            min temperature reading, expressed in degrees Celsius (C)
             | 
| TemperatureMax | 24 | 
            max temperature reading, expressed in degrees Celsius (C)
             | 
| TemperatureAverage | 25 | 
            average temperature reading, expressed in degrees Celsius (C)
             | 
| TopSprayBarsPressure | 26 | 
            Top spray bars pressure reading, expressed in Pascals (Pa)
             | 
| TopWaterKnifePressure | 27 | 
            Top water knife pressure reading, expressed in Pascals (Pa)
             | 
| UltrasonicPowerMin | 28 | 
            min ultrasonic power reading, expressed in Watt (W)
             | 
| UltrasonicPowerMax | 29 | 
            max ultrasonic power reading, expressed in Watt (W) 
             | 
| UltrasonicPowerAverage | 30 | 
            average ultrasonic power reading, expressed in Watt (W)
             | 
| Vacuum | 31 | 
            vacuum reading, expressed in Pascals (Pa)
             | 
| VFDFrequency | 32 | 
            frequency of Variable Frequency Drive, expressed in Hertz (Hz)
             |